Testing of a MEMS Dynamic Inclinometer Using the Stewart Platform.

Area of Science:

• Instrumentation and Measurement
• Mechanical Engineering
• Robotics

Background:

• Micro-electro-mechanical systems (MEMS) dynamic inclinometers are crucial for real-time tilt measurement.
• Traditional testing methods for inclinometers may have limitations in assessing dynamic performance.
• Stewart platforms offer advanced capabilities for generating complex spatial motions.

Purpose of the Study:

• To investigate the application of spatial orbits generated by a Stewart platform for testing MEMS dynamic inclinometers.
• To determine the sensitivities of gyroscope, accelerometer, and tilt sensing using this novel method.
• To evaluate the cross-coupling influence on tilt angle measurements.

Main Methods:

• Utilized a Stewart platform capable of six degrees of freedom spatial orbits.
• Analyzed inverse and forward kinematics for precise control and measurement of the platform's position and orientation.
• Controlled the Stewart platform to generate conical motion for sensitivity determination.
• Generated spatial positional orbits to assess cross-coupling effects.

Main Results:

• Successfully determined gyroscope, accelerometer, and tilt sensing sensitivities using the Stewart platform.
• Quantified tilt angles influenced by cross-coupling effects through spatial positional orbits.
• Demonstrated low amplitude frequency deviations (<0.2 dB for gyroscope, <0.1 dB for tilt sensing) compared to traditional rotators.

Conclusions:

• The Stewart platform provides a viable and accurate method for testing MEMS dynamic inclinometers.
• This approach offers high precision in determining sensor sensitivities and evaluating cross-coupling influences.
• The method shows comparable or improved accuracy over traditional testing techniques.