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External Electromagnet FPCB Micromirror for Large Angle Laser Scanning.

Karlmarx G K Periyasamy1, Vixen Joshua Tan2, Siyuan He3

  • 1Mechatronics and MEMS Research Laboratory, Ryerson University, Toronto, ON M5B 2K3, Canada. karlmarx.golanthan@ryerson.ca.

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Summary

A novel flexible printed circuit board (FPCB) micromirror design using electromagnets and permanent magnets significantly improves rotation angle and reduces size. This advanced FPCB micromirror offers superior performance for optical applications.

Keywords:
external electromagnetflexible printed circuit board (FPCB) micromirrorhigh flatnesslarge aperturemoving permanent magnet (PM)

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Optics
  • Materials Science

Background:

  • Flexible printed circuit board (FPCB) micromirrors are crucial for optical systems.
  • Previous designs faced limitations in rotation angle and device width.

Purpose of the Study:

  • To propose and validate a new FPCB micromirror design.
  • To overcome limitations of prior external permanent magnet (PM) plus moving coil configurations.
  • To enhance device performance metrics.

Main Methods:

  • Design and simulation of an FPCB micromirror with external electromagnets and moving PMs.
  • Fabrication of a prototype.
  • Experimental testing and performance evaluation.

Main Results:

  • Achieved a maximum resonant rotation angle of 62° (optical) at ±3 V.
  • Reduced required width beyond the mirror plate to 6 mm.
  • Demonstrated a larger aperture (8 mm × 5.5 mm) with high optical quality (<10 nm roughness, >10 m ROC flatness).

Conclusions:

  • The proposed external electromagnet plus moving PM FPCB micromirror design surpasses previous configurations.
  • The new design offers a larger maximum rotation angle and a more compact form factor.
  • This advancement holds promise for next-generation optical devices requiring high-performance micromirrors.