High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform

We demonstrate, to the best of our knowledge, the first thermally reconfigurable high-Q silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around 2.67×10^-5/K for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-μm-radius microring resonator with intrinsic Q of 139,000 at infrared wavelengths (∼1550  nm) after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to ∼50  mW per π phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications.