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Updated: Jan 5, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Zhenying Cheng1, Liying Liu1, Peng Xu1
1School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China.
This study optimized a 2D optoelectronic angle sensor, significantly improving its stability against environmental factors. The new design enhances precision measurement equipment reliability.
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