Rapidly fabricating a large area nanotip microstructure for high-sensitivity SERS applications

Jing Ma1, Wen Liu2, Zhe Ma1

  • 1Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. xdwang@semi.ac.cn and Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

Nanoscale
|October 17, 2019
PubMed
Summary

We developed a new silicon nanotip structure using Reactive Ion Etching and anodic aluminum oxide membranes. This structure, coated with silver nanoparticles, shows highly sensitive surface-enhanced Raman scattering (SERS) for molecule detection.

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