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Array MEMS Vector Hydrophone Oriented at Different Direction Angles.

Mengran Liu1, Lei Nie2, Shanqiang Li3

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A novel array Microelectro Mechanical Systems (MEMS) vector hydrophone resolves left-right ambiguity, enabling precise sound source positioning. This MEMS hydrophone offers high performance and cost-effectiveness for underwater applications.

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Area of Science:

  • Acoustics
  • Micro-Electro-Mechanical Systems (MEMS)
  • Underwater acoustics

Background:

  • Conventional hydrophones often suffer from left-right ambiguity, limiting accurate sound source localization.
  • Existing MEMS hydrophones offer sensitivity and low cost but may lack precise directional capabilities.

Purpose of the Study:

  • To develop a novel array MEMS vector hydrophone that overcomes left-right ambiguity.
  • To enable accurate measurement of sound source direction and position.
  • To maintain high sensitivity and low fabrication cost.

Main Methods:

  • Integration of four MEMS units oriented at different angles to form an array.
  • Analysis and simulation of the array microstructure's working principle.
  • Fabrication of a prototype hydrophone using standard MEMS technology.
  • Performance testing in a standing wave tube and an anechoic tank.

Main Results:

  • The array MEMS vector hydrophone successfully addresses the left-right ambiguity problem.
  • Simulations confirmed the ability to accurately determine sound source position.
  • Experimental results demonstrated good consistency among the four units and satisfactory overall performance.
  • The hydrophone exhibited excellent positioning capabilities with minimal angular error.

Conclusions:

  • A multifunctional MEMS hydrophone with high performance and positioning accuracy has been realized.
  • This array hydrophone has significant theoretical and practical implications for underwater acoustics.
  • The technology is particularly relevant for small-size underwater vehicles requiring precise localization.