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Published on: October 9, 2017
Acoustic end corrections for micro-perforated plates
Vahid Naderyan1, Richard Raspet1, Craig J Hickey1
1Department of Physics and Astronomy, National Center for Physical Acoustics, University of Mississippi, University, Mississippi 38677, USAvahid.nad@gmail.com; raspet@olemiss.edu; chickey@olemiss.edu.
Formulas for micro-perforated plates (MPPs) in micro-electro-mechanical systems (MEMS) were developed using analytical and finite element methods. These models quantify reactive and resistive end effects, aiding MPP and MEMS optimization.
Area of Science:
- Acoustics
- Mechanical Engineering
- Micro-electro-mechanical Systems (MEMS)
Background:
- Micro-perforated plates (MPPs) are critical acoustic components in MEMS.
- Understanding the end effects of perforations is essential for accurate acoustic modeling.
Purpose of the Study:
- To develop analytical formulas for the reactive and resistive end effects in MPPs.
- To investigate the loss mechanisms associated with resistive end effects using FEM.
- To provide models for optimizing MEMS and MPP designs.
Main Methods:
- Combined analytical solution for perforated plates with Finite Element Method (FEM).
- Developed formulas for reactive and resistive end effects based on perforation parameters.
- Utilized FEM to analyze acoustic loss mechanisms.
Main Results:
- Reactive end effect is dependent on hole radius and porosity.
- Resistive end effect is solely dependent on hole radius.
- FEM analysis provided insights into the physical loss mechanisms.
Conclusions:
- The developed formulas accurately model MPP end effects.
- The findings facilitate the optimization of acoustic performance in MEMS devices.
- This work provides a foundation for further research into MPP acoustics.
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