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Acoustic end corrections for micro-perforated plates.

Vahid Naderyan¹, Richard Raspet¹, Craig J Hickey¹

¹Department of Physics and Astronomy, National Center for Physical Acoustics, University of Mississippi, University, Mississippi 38677, USAvahid.nad@gmail.com; raspet@olemiss.edu; chickey@olemiss.edu.

The Journal of the Acoustical Society of America

|November 2, 2019

Summary

This summary is machine-generated.

Formulas for micro-perforated plates (MPPs) in micro-electro-mechanical systems (MEMS) were developed using analytical and finite element methods. These models quantify reactive and resistive end effects, aiding MPP and MEMS optimization.

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Area of Science:

Acoustics
Mechanical Engineering
Micro-electro-mechanical Systems (MEMS)

Background:

Micro-perforated plates (MPPs) are critical acoustic components in MEMS.
Understanding the end effects of perforations is essential for accurate acoustic modeling.

Purpose of the Study:

To develop analytical formulas for the reactive and resistive end effects in MPPs.
To investigate the loss mechanisms associated with resistive end effects using FEM.
To provide models for optimizing MEMS and MPP designs.

Main Methods:

Combined analytical solution for perforated plates with Finite Element Method (FEM).
Developed formulas for reactive and resistive end effects based on perforation parameters.
Utilized FEM to analyze acoustic loss mechanisms.

Main Results:

Reactive end effect is dependent on hole radius and porosity.
Resistive end effect is solely dependent on hole radius.
FEM analysis provided insights into the physical loss mechanisms.

Conclusions:

The developed formulas accurately model MPP end effects.
The findings facilitate the optimization of acoustic performance in MEMS devices.
This work provides a foundation for further research into MPP acoustics.