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Acoustic end corrections for micro-perforated plates.

Vahid Naderyan1, Richard Raspet1, Craig J Hickey1

  • 1Department of Physics and Astronomy, National Center for Physical Acoustics, University of Mississippi, University, Mississippi 38677, USAvahid.nad@gmail.com; raspet@olemiss.edu; chickey@olemiss.edu.

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Formulas for micro-perforated plates (MPPs) in micro-electro-mechanical systems (MEMS) were developed using analytical and finite element methods. These models quantify reactive and resistive end effects, aiding MPP and MEMS optimization.

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Area of Science:

  • Acoustics
  • Mechanical Engineering
  • Micro-electro-mechanical Systems (MEMS)

Background:

  • Micro-perforated plates (MPPs) are critical acoustic components in MEMS.
  • Understanding the end effects of perforations is essential for accurate acoustic modeling.

Purpose of the Study:

  • To develop analytical formulas for the reactive and resistive end effects in MPPs.
  • To investigate the loss mechanisms associated with resistive end effects using FEM.
  • To provide models for optimizing MEMS and MPP designs.

Main Methods:

  • Combined analytical solution for perforated plates with Finite Element Method (FEM).
  • Developed formulas for reactive and resistive end effects based on perforation parameters.
  • Utilized FEM to analyze acoustic loss mechanisms.

Main Results:

  • Reactive end effect is dependent on hole radius and porosity.
  • Resistive end effect is solely dependent on hole radius.
  • FEM analysis provided insights into the physical loss mechanisms.

Conclusions:

  • The developed formulas accurately model MPP end effects.
  • The findings facilitate the optimization of acoustic performance in MEMS devices.
  • This work provides a foundation for further research into MPP acoustics.