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Related Experiment Video

Updated: Jan 4, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Chip-scale humidity sensor based on a silicon nanobeam cavity.

Minmin You, Zude Lin, Fangfang Wang

    Optics Letters
    |November 2, 2019
    PubMed
    Summary

    This study introduces a new silicon nanobeam cavity humidity sensor using PMMA cladding. The sensor offers fast, stable, and reversible humidity detection, compatible with CMOS technology.

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    Area of Science:

    • Photonics
    • Materials Science
    • Sensor Technology

    Background:

    • Humidity sensors are crucial for environmental monitoring and industrial processes.
    • Existing sensors often face limitations in response time, stability, or fabrication compatibility.
    • Integrated photonics offers potential for miniaturized and high-performance sensing solutions.

    Purpose of the Study:

    • To demonstrate a novel chip-scale humidity sensor utilizing a silicon nanobeam cavity.
    • To evaluate the sensor's performance characteristics, including sensitivity, response time, and stability.
    • To explore the integration of photonic devices for advanced humidity detection.

    Main Methods:

    • Fabrication of a silicon nanobeam cavity with polymethyl methacrylate (PMMA) cladding.

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  • Characterization of the sensor's wavelength shift in response to varying relative humidity (RH).
  • Assessment of response time, stability, reversibility, and temperature insensitivity post-annealing.

    • Main Results:

    • The sensor demonstrated a linear wavelength dependence of 22.9 pm/% RH across a wide RH range (10%-85%).
    • Achieved an ultra-fast response time of 540 ms with high stability.
    • Exhibited excellent reversibility, repeatability, and temperature insensitivity (25°C-40°C) after annealing.

    Conclusions:

    • This work presents the first application of integrated photonics for high-performance humidity sensing.
    • The developed sensor is CMOS-compatible, offering a pathway for integration with photonic devices and systems.
    • The novel sensor provides a promising solution for miniaturized, efficient, and accurate humidity detection.