Strain relaxation of InGaN/GaN multi-quantum well light emitters via nanopatterning

Strain in InGaN/GaN multiple-quantum well (MQW) light emitters was relaxed via nanopatterning using colloidal lithography and top-down plasma etching. Colloidal lithography was performed using Langmuir-Blodgett dip-coating of samples with silica particles (d = 170, 310, 690, 960 nm) and a Cl₂/N₂ inductively coupled plasma etch to produce nanorod structures. The InGaN/GaN MQW nanorods were characterized using X-ray diffraction (XRD) reciprocal space mapping to quantify the degree of relaxation. A peak relaxation of 32% was achieved for the smallest diameter features tested (120 nm after etching). Power-dependent photoluminescence at 13 K showed blue-shifted quantum well emission upon relaxation, which is attributed to reduction of the inherent piezoelectric field in the III-nitrides. Poisson-Schrödinger simulations of single well structures also predicted increasing spectral blueshift with strain relaxation, in agreement with experiments.