Improving the sensitivity of guided-mode resonance sensors under oblique incidence condition

We present an investigation on the use of oblique incidence condition to enhance the sensitivity of guided-mode resonance (GMR) sensors. By adjusting the incident angle, the enhancement of GMR sensitivity in non-subwavelength regime can be obtained. The measured results show that the bulk sensitivity of the GMR sensors with period of 809 nm climbs to 177% or 292% as the incident angle increases from 15° to 25° or 35°, respectively. The same trend is also obtained for the grating period of 994 nm. Simulations based on the rigorous coupled wave analysis (RCWA) method were performed, and we also built a new slab waveguide model to describe the relationship between bulk sensitivity and the incident angle. The present investigation demonstrates a new method for enhancing the bulk sensitivity of GMR sensor. Moreover, simple fabrication techniques can be utilized since a large grating period was used.