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Related Experiment Video

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Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

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Generating Third Harmonic Vacuum Ultraviolet Light with a TiO₂ Metasurface.

Michael Semmlinger, Ming Zhang, Ming Lun Tseng^1,2

¹Research Center for Applied Sciences , Academia Sinica , Taipei 115 , Taiwan.

|November 7, 2019

Summary

This study demonstrates efficient vacuum ultraviolet (VUV) light generation using dielectric metasurfaces. Titanium dioxide nanostructures enhance VUV third harmonic generation, enabling broader access to this spectral region.

Keywords:

Vacuum ultraviolet anapole metamaterial metasurface third harmonic generation titanium dioxide

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Area of Science:

Photonics and Nanotechnology
Nonlinear Optics

Background:

Dielectric metasurfaces offer low optical absorption and tunable electromagnetic field enhancement for harmonic generation.
Metasurfaces enable the design of meta-atoms for specific light-matter interactions.

Purpose of the Study:

To demonstrate vacuum ultraviolet (VUV) third harmonic generation using a dielectric metasurface.
To enhance VUV light generation at 185 nm via tailored nanostructure design.

Main Methods:

Fabrication of a titanium dioxide (TiO2) nanostructure array metasurface.
Design optimization to achieve optical resonance at the fundamental wavelength (555 nm).
Analysis of mode properties to identify the enhancement mechanism (anapole resonance).

Main Results:

Achieved VUV third harmonic generation at 185 nm.
Observed an enhancement factor of approximately 180 compared to unpatterned TiO2 films.
Identified anapole resonance as the source of strong field enhancement.

Conclusions:

The designed dielectric metasurface is effective for compact VUV light generation.
This approach enhances access to the VUV spectral region.
Anapole resonance in dielectric metasurfaces is a viable strategy for efficient harmonic generation.