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Updated: Jan 4, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

A rapid measurement method for structured surface in white light interferometry.

Zili Lei¹, Xiaojun Liu¹, L I Zhao¹

¹State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, PR China.

Journal of Microscopy

|November 8, 2019

Summary

This summary is machine-generated.

This study introduces a rapid surface measurement method using white light interferometry (WLI) with a single interferogram. The technique enhances efficiency by employing Hilbert transform and zero optical path difference detection for accurate surface recovery.

Keywords:

Hilbert transform (HT)phase unwrapping sampling analysis single-frame interferogram structured surface measurement white light interferometry (WLI)width of the fringes

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Area of Science:

Optical Metrology
Surface Science
Signal Processing

Background:

White light interferometry (WLI) is a standard technique for structured surface measurement.
Traditional WLI requires multiframe interferograms and vertical scanning, leading to time-consuming and computationally intensive processes.
This limits the efficiency of WLI for large-scale or rapid measurements.

Purpose of the Study:

To develop a rapid surface measurement method for WLI using only a single interferogram.
To enhance the efficiency and reduce the computational load of WLI surface recovery.
To ensure accuracy and reliability in single-frame WLI measurements.

Main Methods:

Utilized Hilbert transform (HT) to solve wrapped phases from a single white-light interferogram.
Implemented a zero optical path difference (OPD) detection algorithm for phase unwrapping.
Analyzed and determined optimal interference fringe number and width based on HT and sampling theory.

Main Results:

Successfully demonstrated the feasibility of phase recovery from a single interferogram using HT.
Achieved efficient surface recovery by unwrapping phases against the zero OPD position.
Validated the accuracy and efficiency of the proposed method through measurements of standard samples.

Conclusions:

The proposed single-frame WLI method significantly reduces measurement time and computational complexity.
This approach offers a viable alternative for rapid and accurate structured surface measurement.
The findings provide a foundation for more efficient WLI applications.