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Updated: Jan 4, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Design and Validation of a Holographic Particle Counter
Georg Brunnhofer1,2,3, Alexander Bergmann2, Andreas Klug3
1Photonic Systems, CTR Carinthian Tech Research AG, 9524 Villach/St. Magdalen, Austria.
Abstract:
An in-line holographic particle counter concept is presented and validated where multiple micrometer sized particles are detected in a three dimensional sampling volume, all at once. The proposed PIU is capable of detecting holograms of particles which sizes are in the lower μ m- range. The detection and counting principle is based on common image processing techniques using a customized HT with a result directly relating to the particle number concentration in the recorded sampling volume. The proposed counting unit is mounted ontop of a CNM for comparison with a commercial TSI-3775 CPC. The concept does not only allow for a precise in-situ determination of low particle number concentrations but also enables easy upscaling to higher particle densities (e.g., > 30 . 000 # c c m ) through its linear expandability and option of cascading. The impact of coincidence at higher particle densities is shown and two coincidence correction approaches are presented where, at last, its analogy to the coincidence correction methods used in state-of-the-art CPCs is identified.

