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Laboratory setup for extreme ultraviolet coherence tomography driven by a high-harmonic source.

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We developed a new laboratory beamline for nanoscale subsurface imaging using extreme ultraviolet coherence tomography (XCT). This advanced system achieves 16 nm depth resolution for silicon nanostructures.

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Area of Science:

  • Materials Science
  • Optics and Photonics
  • Nanotechnology

Background:

  • Subsurface imaging of nanostructures is crucial for materials science and nanotechnology.
  • Existing techniques often lack the resolution or accessibility required for detailed nanoscale analysis.

Purpose of the Study:

  • To present a novel laboratory beamline for nanoscale subsurface imaging.
  • To demonstrate the capabilities of extreme ultraviolet coherence tomography (XCT) at a laboratory scale.
  • To enable routine cross-sectional imaging of nanometer-scale layered samples.

Main Methods:

  • Utilizing a laser-driven high-harmonic source to generate broad-bandwidth extreme ultraviolet (XUV) radiation (30-130 eV).
  • Employing a laboratory-scale beamline with a beam divergence of 10 mrad (FWHM).
  • Measuring broadband reflectivity using an XUV spectrometer for tomographic reconstruction.

Main Results:

  • Achieved a depth resolution of 16 nm using a spectral range of 36-98 eV.
  • Demonstrated routine cross-sectional imaging of layered nanometer-scale samples.
  • The broader spectral range resulted in a 33% increase in resolution compared to previous studies.

Conclusions:

  • The developed XCT beamline provides a powerful laboratory tool for nanoscale subsurface imaging.
  • The system is particularly well-suited for investigating silicon-based nanostructured samples.
  • This advancement facilitates detailed characterization of nanostructures with improved resolution and accessibility.