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Quartz tuning fork mass change sensing for FIB/SEM technology
Piotr Kunicki1, Magdalena Moczała-Dusanowska1, Grzegorz Jóźwiak1
1Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Ul. Z. Janiszewskiego 11/17, PL-50372 Wrocław, Poland.
Micron (Oxford, England : 1993)
|December 8, 2019
Summary
We developed a new method using quartz tuning fork sensors to measure the mass density of focused ion beam induced deposition (FIBID) materials. This technique achieves high resolution and accuracy for nanostructure characterization, crucial for advanced microfabrication.
Area of Science:
- Materials Science
- Metrology
- Nanotechnology
Background:
- Accurate characterization of nanostructures is essential for advancing microfabrication technologies.
- Focused Ion Beam Induced Deposition (FIBID) is a versatile technique for creating nanoscale materials.
- Existing methods for determining the density of FIBID materials have limitations in resolution and accuracy.
Purpose of the Study:
- To present a novel metrological method for determining the mass density of FIBID materials.
- To establish a reliable and repeatable technique for nanostructure characterization.
- To enable precise determination of FIBID precursor parameters.
Main Methods:
- Utilizing quartz tuning fork (QTF) mass change sensors for mass determination.
- Implementing an electrical actuation and signal read-out system for QTF sensors.
- Developing a metrological methodology for high-resolution mass change measurement.
Main Results:
- Achieved a mass change resolution of 5 picograms (pg).
- Demonstrated an accuracy of below 5% for density determination.
- Validated the method's suitability for in-situ FIBID precursor parameter determination.
Conclusions:
- The proposed QTF-based method offers a highly accurate and precise approach for FIBID material characterization.
- This technique is vital for the development of reliable and versatile microfabrication processes.
- The excellent properties of quartz ensure high accuracy, resolution, and stability in measurements.
