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Spatial and spectral dynamics in STEM hyperspectral imaging using random scan patterns.

Alberto Zobelli1, Steffi Y Woo1, Anna Tararan1

  • 1Laboratoire de Physique des Solides, Université Paris-Saclay, CNRS UMR 8502, F-91405 Orsay, France.

Ultramicroscopy
|December 9, 2019
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Summary
This summary is machine-generated.

We developed a random scan mode for scanning transmission electron microscopes (STEM) to reduce electron dose effects. This new method improves image acquisition speed and allows for better analysis of hyperspectral images.

Keywords:
CathodoluminescenceEELSScan controlScanning transmission electron microscopySparse imaging

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Area of Science:

  • Materials Science
  • Electron Microscopy
  • Spectroscopy

Background:

  • Scanning transmission electron microscopy (STEM) traditionally uses raster scan modes.
  • Acquisition speed and electron dose effects are key limitations in STEM.
  • Arbitrary scan pathways are being explored to overcome these limitations.

Purpose of the Study:

  • To implement and demonstrate a hardware-level random scan operating mode in STEM.
  • To evaluate the benefits of random scanning for image acquisition speed and dose reduction.
  • To showcase the application of random scanning in spectro-microscopy for enhanced data analysis.

Main Methods:

  • Implementation of a custom scan control module for hardware-level random scanning in STEM.
  • Utilizing a pre-defined, shuffled raster pattern to sample regions of interest.
  • Application of image reconstruction techniques to subsampled random sparse images.
  • Demonstration using electron energy loss spectroscopy (EELS) and cathodoluminescence (CL) spectrum imaging.

Main Results:

  • Random scan mode effectively reduces electron dose accumulation compared to conventional raster scanning.
  • Decoupling of spatial and temporal information in hyperspectral images is achieved.
  • Atomically-resolved elemental maps and nanoscale CL spectrum images were successfully generated.
  • Precise tracking and correction of sample instabilities and spectral diffusion were demonstrated.

Conclusions:

  • The random scan operating mode in STEM offers a flexible approach to enhance acquisition speed and minimize dose effects.
  • This method enables advanced analysis of hyperspectral data, including tracking sample dynamics.
  • Random scanning provides a powerful tool for spectro-microscopy applications, yielding high-resolution elemental and spectral information.