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Updated: Jan 2, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Dynamic spring constants of higher resonance modes of uniform and tapered microcantilevers with tip masses
1Professor of Mechanical Engineering (Retired), 1222 Willow Point Dr, Murphy, Tx, 75094, USA.
Abstract:
A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of width-tapered microcantilevers for a wide range of the taper ratio and tip mass ratios. Closed form expressions are presented, which could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.
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