Study of Edge and Screw Dislocation Density in GaN/Al₂O₃ Heterostructure

This study assesses the characteristics (edge and screw dislocation density) of a commercially available GaN/AlN/Al₂O₃ wafer. The heterostructure was evaluated by means of high-resolution X-ray diffraction (HR-XRD), high-resolution transmission electron microscopy (HR-TEM), and Doppler-Broadening Spectroscopy (DBS). The results were mathematically modeled to extract defect densities and defect correlation lengths in the GaN film. The structure of the GaN film, AlN buffer, Al₂O₃ substrate and their growth relationships were determined through HR-TEM. DBS studies were used to determine the effective positron diffusion length of the GaN film. Within the epitaxial layers, defined by a [GaN P 63 m c (0 0 0 2) || P 63 m c AlN (0 0 0 2) || (0 0 0 2) R 3 ¯ c Al₂O₃] relationship, regarding the GaN film, a strong correlation between defect densities, defect correlation lengths, and positron diffusion length was assessed. The defect densities ρ d e = 6.13 × 10¹⁰ cm^-2, ρ d s = 1.36 × 10¹⁰ cm^-2, along with the defect correlation lengths L^e = 155 nm and L^s = 229 nm found in the 289 nm layer of GaN, account for the effective positron diffusion length L_eff~60 nm.