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Updated: Jan 1, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Multiwavelength digital holography in the presence of vibrations: laterally resolved multistep phase-shift extraction
Abstract:
With the application of multiwavelength digital holography in rough environments, such as where machine tools are used, we cannot rely on the complete absence of vibrations. The evaluation of temporal phase shifting in multiple interferograms regions allows one to determine and take into account random subwavelength tilt changes during image acquisition of the sensor with respect to a work piece. In this regard, experimental data inside a controlled laboratory setup, as well as data acquired within a five-axis machine tool suffering from random vibrations, are evaluated and affirmed by a simulation model.
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