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Active Thermoelectric Vacuum Sensor Based on Frequency Modulation

Shu-Jung Chen1, Yung-Chuan Wu1

  • 1Department of Mechatronics Engineering, National Changhua University of Education, Changhua City 50074, Taiwan.

Micromachines
|December 28, 2019
PubMed

Keywords:
frequency modulationthermoelectric-type vacuum sensorvacuum detection

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