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Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO3/Si Microring Resonator
Sosuke Matsuura1, Naoki Yamasaku1, Yoshiaki Nishijima1
1Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan.
Sensors (Basel, Switzerland)
|December 28, 2019
Summary
A new optical hydrogen sensor using silicon microring resonators and tungsten oxide was developed. This sensor detects low hydrogen concentrations, with sensitivity increasing at lower temperatures.
Area of Science:
- Materials Science
- Nanotechnology
- Optical Engineering
Background:
- Hydrogen is a promising clean energy carrier, necessitating advanced detection technologies.
- Simple, highly sensitive hydrogen sensors are crucial for safety and efficiency.
- Optical sensors offer potential advantages in sensitivity and selectivity.
Purpose of the Study:
- To fabricate and characterize a novel optical hydrogen sensor.
- To investigate the effect of temperature on sensor performance.
- To explore enhanced sensor designs for improved hydrogen detection.
Main Methods:
- Fabrication of a silicon microring resonator (MRR) with tungsten oxide (WO3) using CMOS-compatible and sol-gel processes.
- Investigation of sensor characteristics at various device temperatures (5, 20, 30 °C).
- Theoretical discussion of a silicon-MRR-enhanced Mach-Zehnder interferometer (MRR-MZI) for superior sensing.
Main Results:
- Successful detection of hydrogen concentrations as low as 0.1 vol% at all tested temperatures.
- Gas sensitivity demonstrated an inverse relationship with device temperature.
- Attribution of temperature-dependent sensitivity to the thickness of formed tungsten bronze (HxWO3).
Conclusions:
- The developed optical hydrogen sensor exhibits high sensitivity and low-detection capabilities.
- Lower operating temperatures enhance the sensor's gas sensitivity.
- The proposed MRR-MZI design holds promise for significantly improved hydrogen sensing performance.
