Microdisk resonators with lithium-niobate film on silicon substrate

In this paper, we report the fabrication of lithium niobate (LN) microdisk resonators on a pulsed-laser deposited polycrystalline LN film on a silicon substrate rather than commercially provide LN film on insulator. The quality factor of these polycrystalline LN microdisks were measured above 3.4×10⁴ in the 1550-nm band. Second harmonic generation was demonstrated in the fabricated microresonators. Because the properties of homemade LN film can be easily tuned by doping various ions, LN devices on homemade LN film may have more flexible functions and broad applications.