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    A novel micro-grating accelerometer with gram-scale proof mass significantly reduces noise. This high-resolution accelerometer achieves a 137 ng/√Hz noise floor and 3.1 µg bias stability, advancing inertial navigation and seismic monitoring.

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    Area of Science:

    • * Physics
    • * Optical Engineering
    • * Metrology

    Background:

    • * Micro-grating accelerometers are crucial for inertial navigation and seismic monitoring.
    • * Thermal mechanical noise fundamentally limits accelerometer resolution.
    • * Previous prototypes faced challenges with noise and bias stability.

    Purpose of the Study:

    • * To propose a micro-grating accelerometer prototype with a gram-scale proof mass.
    • * To decrease thermal mechanical noise for higher resolution.
    • * To improve the contrast ratio of the 0th order for enhanced performance.

    Main Methods:

    • * Development of a micro-grating accelerometer with a gram-scale proof mass.
    • * Establishment of a theoretical model for contrast ratio based on Gaussian beam theory.
    • * Implementation of a scanning slit beam profiler for contrast ratio adjustment.

    Main Results:

    • * Achieved a noise floor reduction from 0.9 mg/√Hz to 137 ng/√Hz.
    • * Improved bias stability from 0.35 mg to 3.1 µg.
    • * Successfully enhanced the contrast ratio of the 0th order.

    Conclusions:

    • * The proposed micro-grating accelerometer design significantly enhances resolution and stability.
    • * The gram-scale proof mass effectively mitigates thermal mechanical noise.
    • * This advancement holds promise for next-generation inertial navigation and seismic monitoring systems.