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Fake tilts in differential wavefront sensing.

Enrico Massa, Carlo Paolo Sasso, Giovanni Mana

|December 28, 2019

Summary

Two-beam interferometry precisely measures displacement. Differential wavefront sensing, using segmented photodiodes, simultaneously captures translation and rotation, explaining fake tilts in combined X-ray and optical interferometers.

Area of Science:

Physics
Metrology
Optics

Background:

Two-beam interferometry is crucial for high-precision length metrology.
Sub-nanometer resolution and accuracy are achievable with interferometric techniques.
Differential wavefront sensing enhances interferometry by enabling simultaneous measurement of translation and rotation.

Purpose of the Study:

To develop an analytical model for understanding observed phenomena in combined X-ray and optical interferometers.
To explain the occurrence of 'fake tilts' in advanced interferometric systems.

Main Methods:

Utilizing two-beam interferometry for high-precision length measurements.
Implementing differential wavefront sensing with segmented photodiodes for phase detection.
Developing an analytical model to correlate X-ray and optical interferometer data.

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Main Results:

The analytical model successfully explains the observation of fake tilts.
Phase detection by segmented photodiodes is shown to be key in simultaneous translation and rotation measurement.
The study quantifies the conditions under which fake tilts occur.

Conclusions:

The developed model provides a theoretical basis for understanding artifacts in combined interferometry.
Differential wavefront sensing is a powerful technique for multi-dimensional metrology.
Accurate interpretation of interferometric data requires accounting for potential fake tilts.