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Updated: Dec 31, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Tomography reconstruction of beams extracted from an ion source
S Saminathan1, F Ames1, R Baartman1
1TRIUMF, Vancouver, British Columbia V6T 2A3, Canada.
Abstract:
Commissioning of the CANREB (CANadian Rare isotope facility with Electron Beam ion source) system and its associated beamlines has recently begun at TRIUMF. At the head of this beamline is an ion source used to produce stable alkaline ions with energy up to 60 keV for the CANREB system. Throughout commissioning, it is essential to have a means of verifying beam quality and ensuring that the required beam parameters along the beamline are met. This is accomplished using tomography reconstruction, which consists of taking one-dimensional scans at different projections and reconstructing an image of the beam in two dimensions using the maximum entropy algorithm. Tomography enables the visualization of the shape of the beam as well as the investigation into the possible presence of aberrations. Initially, tomography reconstruction is performed by using simulated beam profiles at the measurement locations and is then performed by using measured beam profiles. Additionally, these measurements are benchmarked by fitting the initial beam parameters in our beam optics model, and the results are presented.
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