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Nanowire Ring Embedded in a Flexible Substrate for Local Strain Detection.

Shengkun Li1,2, Yue Qin2, Xin Li2

  • 1Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.

Materials (Basel, Switzerland)
|January 17, 2020
PubMed
Summary

This study introduces a novel semiconductor nanowire ring cavity strain sensor. The optical sensor achieves high sensitivity for micro-deformation detection and offers potential as a tunable light source.

Keywords:
elastic-optic effectintegrated opticsmicroring resonatornanowire sensorstrain sensor

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Area of Science:

  • Optoelectronics
  • Nanotechnology
  • Materials Science

Background:

  • Optical sensing is gaining prominence due to advancements in planar waveguide fabrication.
  • Photons offer potential advantages over electrons as information carriers in sensing applications.
  • Existing side-by-side coupling structures for nanowire sensors suffer from phase shifts and optical loss.

Purpose of the Study:

  • To propose and fabricate a novel strain sensor utilizing an end-to-end semiconductor nanowire ring cavity on a flexible substrate.
  • To investigate the performance of the proposed sensor for detecting micro and nano deformations.
  • To explore the potential of the resonator as a tunable light source for integrated photonic circuits.

Main Methods:

  • Fabrication of an end-to-end ring cavity using semiconductor nanowires integrated onto a flexible substrate.
  • Development of a home-built excitation and detection system for measuring resonant wavelength shifts.
  • Experimental measurement of strain by detecting the red-shift in resonant wavelength as strain increases.

Main Results:

  • The resonant wavelength of the strain gauge exhibited a linear red-shift with applied strain.
  • A high gauge factor of approximately 50 and a Q-factor of 1938 were experimentally determined for structural parameters L = 70 µm and d = 1 µm.
  • The end-to-end coupling design effectively eliminated phase shifts and minimized optical density loss compared to side-by-side coupling.

Conclusions:

  • The developed on-chip strain sensor demonstrates high sensitivity, enabling accurate measurement of micro-deformations.
  • The end-to-end active nanowire waveguides overcome limitations of previous designs, offering improved optical performance.
  • This flexible resonator technology holds promise for advanced micro-deformation sensing and tunable light sources in photonic integrated circuits.