Morphological Analysis of KDP-Crystal Workpiece Surfaces Machined by Ultra-Precision Fly Cutting

Potassium dihydrogen phosphate crystals exhibit excellent nonlinear optical properties that are significantly affected by the surface morphology of the crystal. To comprehensively examine and characterize the morphological features of these crystals, the machined surfaces of workpieces are analyzed using wavelet, fractal, and power spectral density (PSD) methods. First, the fractal method is employed to analyze the features of the machined surfaces of different materials and examine the relationship between the surface roughness and fractal dimension of different materials. Then, the morphological anisotropy of the machined surfaces is analyzed using the two-dimensional PSD method. Based on the orientation of the machined surfaces of the workpieces, the tangential waves on the surfaces are analyzed using wavelet-transform and PSD methods. From a frequency-domain perspective, the scales of various influencing factor signals are identified. Additionally, the frequency range of the spindle vibration is determined based on the machining experiment. On this basis, the cause of the machined surface waviness errors is revealed.