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Parallel Resonance01:23

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The parallel RLC circuit is an arrangement where the resistor (R), inductor (L), and capacitor (C) are all connected to the same nodes and, as a result, share the same voltage across them. The parallel RLC circuit is analyzed in terms of admittance (Y), which reflects the ease with which current can flow. The admittance is given by:
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Double resonance techniques in Nuclear Magnetic Resonance (NMR) spectroscopy involve the simultaneous application of two different frequencies or radiofrequency pulses to manipulate and observe two distinct nuclear spins. One important application of double resonance is spin decoupling, which selectively suppresses coupling with one type of nucleus while observing the NMR signal from another nucleus, simplifying the spectrum and enhancing resolution.
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Design Example01:23

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The innovation of touch-tone telephony revolutionized the telecommunications industry by replacing the traditional rotary dial with a dual-tone multi-frequency (DTMF) signaling system. This system uses a matrix-style keypad with buttons arranged in four rows and three columns, creating 12 distinct signals each assigned to a pair of frequencies. Each button press results in a simultaneous generation of two sinusoidal tones – one from a low-frequency group (697 to 941 Hz) and one from a...
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A clipper circuit is a fundamental wave-shaping device that harnesses the unique properties of diodes to alter and control waveform characteristics. This technology is widely used in electronic devices, especially in television and radar communication systems, where it enhances waveform modulation in both transmitters and receivers.
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Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression.

Yi Zhang1, Jing-Fu Bao1, Xin-Yi Li1

  • 1School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

Micromachines
|January 25, 2020
PubMed
Summary

This study introduces a novel dual interdigital electrode design for thin-film piezoelectric-on-silicon (TPoS) resonators. This design effectively suppresses parasitic capacitive feedthrough, significantly enhancing the signal-to-background ratio for micro-electro-mechanical systems.

Keywords:
MEMSTPoSdifferential-indifferential-outfeedthroughresonator

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Area of Science:

  • Micro-electro-mechanical systems (MEMS)
  • Solid-state physics
  • Electrical engineering

Background:

  • Thin-film piezoelectric-on-silicon (TPoS) resonators are crucial for system-on-chip integrated timing references.
  • Parasitic capacitive feedthrough hinders electrical detection in microscale silicon-based resonators.

Purpose of the Study:

  • To propose and validate a novel structural design for TPoS MEMS resonators to eliminate parasitic capacitive feedthrough.
  • To enhance the signal-to-background ratio (SBR) for improved resonator performance.

Main Methods:

  • A fully-differential configuration utilizing dual interdigital electrodes was designed.
  • Finite-element analysis (FEA) modeling was employed for fundamental principle investigation.
  • Electrical measurements of fabricated devices were conducted for validation.

Main Results:

  • The proposed dual interdigital electrode design effectively suppresses in-phase feedthrough signals.
  • The signal-to-background ratio (SBR) was significantly enhanced.
  • Fabricated TPoS resonators demonstrated improved insertion loss (4.27 dB) and SBR (42.47 dB).

Conclusions:

  • The novel fully-differential configuration with dual interdigital electrodes offers an effective strategy for feedthrough suppression in TPoS MEMS resonators.
  • This approach significantly improves key performance metrics, enabling more reliable integrated timing references.