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Updated: Dec 29, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Wide area quantitative phase microscopy by spatial phase scanning digital holography
Abstract:
A new technique of digital holographic microscopy is introduced for large area quantitative phase microscopy, dubbed spatial phase scanning digital holography, where the object specimen in an interferometer is scanned across the tilted reference phase field, while acquiring camera frames at regular intervals. Both the large area scan and phase shift acquisition are achieved in one sweep, using a simple optomechanical system. The technique can be useful in diverse applications such as fast scans of blood smear, cell and tissue cultures, and microelectronic surface profiles.
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