Related Experiment Video
Updated: Dec 29, 2025

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Perturbation Analysis of Nonlinearity in Radio-Frequency Bulk Acoustic Wave Resonators Using the Mass-Spring Model
Abstract:
This article describes derivation of an equivalent circuit for nonlinear responses in film bulk acoustic resonators from the first-order perturbation analysis using the piezoelectric constitutive equations with the h -form. For simplicity, electrodes and piezoelectric layers are considered as mass and spring, respectively, in the derivation. Then, it is demonstrated that the second- and third-order harmonic responses can be simulated well by the circuit. In addition, nonlinearity in the Si substrate is also taken into account and its impact is discussed. It is also discussed how the frequency dependences vary with the nonlinearity mechanisms as a finding from the derived equivalent circuit.
Related Concept Videos
Frequency of Spring-Mass System
Consider a block on a spring on a frictionless surface. There...
Concept of Resonance and its Characteristics
Linear Approximation in Time Domain
For a simple pendulum with a mass evenly distributed along its length and the center of mass located at half the pendulum's length,...
Design Example: Underdamped Parallel RLC Circuit
Starting with a fixed...
Sound Waves: Resonance
RLC Series Circuits

