Active Periodic Magnetic Nanostructures with High Aspect Ratio and Ultrahigh Pillar Density

Magnetically actuated micro/nanoscale pillars have attracted significant research interest recently because of their dynamic properties. These structures can be used for various applications, such as dry adhesion, cell manipulation, and sensors or actuators in microfluidics. Magnetically actuated structures can be fabricated by mixing magnetic particles and polymers to yield a favorable combination of magnetic permeability and mechanical compliance. However, the pillar density of demonstrated structures is relatively low, which limits the potential applications in active surface manipulation of microscale objects. Here, we demonstrate active periodic nanostructures with a pillar density of 0.25 pillar/μm², which is the highest density for magnetically actuated pillars so far. Having a structure period of 2 μm, diameter of 600 nm, and high aspect ratio of up to 11, this structure can be magnetically actuated with a displacement of up to 200 nm. The behaviors of the pillars under various cyclic actuation modes have been characterized, demonstrating that the actuation can be well controlled. This work can find potential applications in particle manipulation and tunable photonic elements.