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High-Resolution Laser-Induced Graphene. Flexible Electronics beyond the Visible Limit
Michael G Stanford, Cheng Zhang1, Jason D Fowlkes1,2
1Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996, United States.
ACS Applied Materials & Interfaces
|February 11, 2020
Summary
Researchers developed a new method using a visible laser to create smaller laser-induced graphene (LIG) features for advanced flexible electronics and sensors. This technique significantly improves resolution for micro-scale device fabrication.
Area of Science:
- Materials Science
- Nanotechnology
- Graphene Research
Background:
- Laser-induced graphene (LIG) is a versatile graphene foam typically fabricated using infrared lasers and carbon precursors.
- Previous LIG methods had limitations in spatial resolution, restricting the miniaturization of devices.
Purpose of the Study:
- To investigate the direct conversion of polyimide into LIG using a visible 405 nm laser.
- To achieve higher spatial resolution and smaller feature sizes for LIG fabrication.
- To demonstrate the potential of this method for creating advanced flexible electronics and sensors.
Main Methods:
- Direct-write conversion of polyimide into LIG using a 405 nm visible laser.
- In situ observation of LIG formation within an SEM chamber.
- Fabrication and testing of a humidity sensor using the developed LIG.
Main Results:
- Achieved LIG formation with a spatial resolution of approximately 12 μm and thickness under 5 μm.
- Demonstrated a >60% reduction in LIG feature size compared to prior publications.
- Successfully created a flexible humidity sensor with a rapid response time of 250 ms, capable of detecting human breath.
Conclusions:
- Visible laser-induced graphene (LIG) fabrication offers significantly enhanced spatial resolution.
- This advancement enables the creation of high-performance, miniaturized flexible electronics and sensors.
- The developed method holds promise for expanding the applications of LIG technology.

