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Through-Mask Electrochemical Micromachining with Reciprocating Foamed Cathode.
Chenhao Zhao1, Pingmei Ming1, Xinmin Zhang1
1Institute of Non-traditional Machining & Equipment, Henan Polytechnic University, Jiaozuo 454000, China.
Micromachines
|February 15, 2020
Summary
An upgraded foamed-cathode through-mask electrochemical micromachining (TMEMM) process uses magnetic force for assembly and electrolyte movement, enhancing cost-efficiency. This modified TMEMM fabricates highly uniform micro-dimples with smooth surfaces.
Area of Science:
- Materials Science
- Manufacturing Engineering
- Surface Engineering
Background:
- Electrochemical micromachining (EMM) is crucial for micro-scale surface fabrication.
- Foamed-cathode through-mask electrochemical micromachining (TMEMM) offers high geometric consistency for microstructures on curved surfaces.
- Existing TMEMM processes can be improved for cost-efficiency and simplified operation.
Purpose of the Study:
- To develop a modified, cost-efficient foamed-cathode TMEMM process.
- To evaluate the performance of the upgraded TMEMM for micro-dimple fabrication.
- To investigate the influence of magnetic field-driven mass transfer on machining quality.
Main Methods:
- Modified TMEMM process utilizing magnetic force for assembly of the cathode-mask-workpiece unit.
- Employing vertical movement within the electrolyte instead of traditional pump-driven circulation.
- Experimental evaluation of micro-dimple fabrication uniformity and surface roughness.
Main Results:
- The modified TMEMM process successfully fabricated highly uniform micro-dimples.
- Minimum coefficients of variation (CV) for micro-dimple depth and diameter were 5.4% and 1.9%, respectively.
- Achieved smooth micro-dimple surfaces with a minimum Ra of 0.21-0.35 µm, surpassing previous reports.
Conclusions:
- The modified TMEMM process is a cost-efficient and effective method for fabricating uniform micro-dimples.
- Magnetic field-induced magnetohydrodynamic convection enhances mass transfer, improving machining outcomes.
- This upgraded process offers a viable alternative for advanced micro-fabrication applications.

