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Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Zhihu Ruan1,2, Xukai Ding1,2, Zhengcheng Qin1,2

  • 1School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

Micromachines
|February 23, 2020
PubMed

Keywords:
MEMS (Micro-electromechanical Systems) disk resonator gyroscopeelectrostatic negative stiffness effectfrequency splitmode-matchingvirtual Coriolis force

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