Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor
Mingyuan Ren1, Honghai Xu1, Xiaowei Han2
1School of Software and Microelectronics, Harbin University of Science and Technology, Harbin 150080, China.
Sensors (Basel, Switzerland)
|February 28, 2020
Abstract:
A low noise interface ASIC for micro gyroscope with ball-disc rotor is realized in 0.5µm CMOS technology. The interface circuit utilizes a transimpedance pre-amplifier which reduces input noise. The proposed interface achieves 0.003 o/s/Hz1/2 noise density and 0.003 o/s sensitivity with ±100 o/s measure range. The functionality of the full circuit, including circuit analysis, noise analysis and measurement results, has been demonstrated.
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