Coaxial semi-dipole antenna microwave feeding on electron cyclotron resonance multicharged ion source

How to produce multicharged ions efficiently on an electron cyclotron resonance ion source (ECRIS) has been investigated at Osaka University. Notably, in recent years, we have focused on heating by new resonance superimposing to electron cyclotron resonance (ECR) plasma. To evaluate its efficiency, we need to know the maximum efficiency of heating with ECR alone, and then, further optimization of ECR heating is required. In consideration of wave propagation, we installed the coaxial semi-dipole antenna on the mirror end along the geometrical axis of the vacuum chamber. We aim at exciting the strength of right-hand polarization (RHP) waves for efficient ECR because RHP waves give rise to ECR. We measure plasma parameters by Langmuir probes and charge state distributions (CSDs) of the extracted ion beams and investigate their qualitative tendencies to incident microwave powers and pressures. We compare the qualitative trend of ion beams and their CSD on microwave power in the case of both the microwave feeding system by the coaxial semi-dipole antenna and that by the rod antenna. Differences between the microwave feeding system before improving and then after upgrading are made clear.