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Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source
1Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China.
Abstract:
A very compact permanent magnet 2.45 GHz electron cyclotron resonance ion source has been designed and developed for various purposes. The microwave power is coupled into the plasma chamber using the coaxial antenna instead of the waveguide, the magnetic field is produced by two NdFeB permanent magnet rings, and the diameter of the source body is only 10 cm. The beam current under different conditions was measured. A maximum of 5.8 mA H+/H2 +/H3 + mixed beam could be extracted from a 5.5 mm diameter extraction aperture.
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