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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
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Muon implantation experiments in films: Obtaining depth-resolved information
A F A Simões1, H V Alberto1, R C Vilão1
1CFisUC, Department of Physics, University of Coimbra, R. Larga, P-3004-516 Coimbra, Portugal.
The Review of Scientific Instruments
|March 2, 2020
Summary
Low-energy muons probe thin films by varying implantation energy. This method extracts depth-resolved information from muon spin spectroscopy experiments, identifying effects within heterostructures.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Surface Science
Background:
- Low-energy muons (1-30 keV) are effective local probes for thin films and multi-layer structures.
- Muon stopping depth depends on implantation energy and material density, extending over tens of nanometers.
- Extracting depth-dependent experimental parameters requires adequate simulation procedures.
Purpose of the Study:
- To present a method for extracting depth-resolved information from low-energy muon spin spectroscopy (LE-μSR) experiments.
- To demonstrate the application of this method to analyze heterostructures.
- To identify the location and depth extent of experimental effects.
Main Methods:
- Utilizing the implantation energy dependence of experimental parameters in LE-μSR.
- Developing a simulation procedure to analyze depth-resolved data.
- Applying the method to a Cu(In,Ga)Se2 semiconductor film with an Al2O3 coating.
Main Results:
- Successfully extracted depth-resolved information from LE-μSR data.
- Demonstrated the method's applicability to semiconductor/insulator heterostructures.
- Confirmed the method's ability to pinpoint the location and depth of observed effects.
Conclusions:
- The presented method enables depth profiling in thin films and heterostructures using LE-μSR.
- This technique is crucial for understanding material properties at the nanoscale.
- It provides a valuable tool for identifying and localizing phenomena within complex layered materials.

