Heterodyne speckle interferometry for measurement of two-dimensional displacement

This paper presented a heterodyne speckle interferometer (HSI) for the measurement of two-dimensional in-plane displacement. A diffraction grating is used to split the light source into four beams, which are then reflected into a non-mirror measurement surface at symmetrical incident angles, before being scattered to form an interference pattern. In accordance with the Doppler Effect, in-plane displacement of the surface causes phase variations in speckle interference patterns, from which displacement information can be obtained. Several experiments were performed to evaluate the feasibility of the proposed HSI. Experiment results demonstrate that the proposed system is capable of accurately measuring in-plane displacement with a resolution of approximately 1.5 nm.