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Advances in High-Resolution Radiation Detection Using 4H-SiC Epitaxial Layer Devices
Krishna C Mandal1, Joshua W Kleppinger1, Sandeep K Chaudhuri1
1Department of Electrical Engineering, University of South Carolina, Columbia, SC 29208, USA.
Micromachines
|March 4, 2020
Summary
Researchers developed miniature 4H-silicon carbide (SiC) radiation detectors for harsh environments. These devices exhibit superior energy resolution for alpha particles, advancing radiation detection technology.
Area of Science:
- Materials Science
- Nuclear Instrumentation
- Semiconductor Physics
Background:
- Miniature radiation detectors are crucial for harsh environment applications.
- Silicon carbide (SiC) offers excellent material properties for radiation detection.
- Previous research has focused on improving the performance and reliability of SiC detectors.
Purpose of the Study:
- To review advances in miniature 4H-SiC radiation detectors.
- To investigate defect levels in 4H-SiC epilayers.
- To correlate material properties with radiation detection performance.
Main Methods:
- Fabrication of miniature Schottky barrier devices (SBDs) on 4H-SiC epitaxial wafers (20 or 50 µm thickness).
- Investigation of defect levels within the 4H-SiC epilayers.
- Characterization of radiation detection properties of the fabricated SBDs.
Main Results:
- Development of miniature 4H-SiC SBDs with an active area of approximately 11 mm².
- Identification of defect levels in 4H-SiC epilayers.
- Achieved the highest reported energy resolution for alpha particles using these miniature detectors.
Conclusions:
- Miniature 4H-SiC SBDs demonstrate superior radiation detection capabilities.
- Understanding and controlling defect levels are critical for optimizing detector performance.
- These findings pave the way for advanced radiation detection in demanding environments.
Keywords:
4H-SiC, epitaxial layerSchottky barrierdeep level transient spectroscopy (DLTS)electron beam induced current spectroscopy (EBIC)point defectspulse height spectroscopy (PHS)radiation detectorsilicon carbidethermally stimulated current spectroscopy (TSC)
