Vectorial pupil optimization to compensate polarization distortion in immersion lithography system

Polarization distortion innately exists in hyper numerical aperture immersion lithography system. Polarization distortion, mainly including polarization aberration (PA) of lithography projection optics and thick mask induced polarization distortion, would seriously impact on lithography imaging quality. Some computational lithography technologies, such as robust optical proximity correction and robust source and mask optimization, have been introduced and developed to reduce the impact of polarization distortion on lithography imaging. In this paper, we innovate a vectorial pupil optimization (VPO) method to further extend degrees of freedom for pupil optimization and compensate polarization distortion for immersion lithography system. An analytical relationship between lithography imaging and active vectorial pupil, and the gradient-based algorithm is adopted to effectively solve VPO. Extensive simulations demonstrate the VPO method simultaneously compensate the PA of projection optics and the thick mask induced polarization distortion sufficiently. Based on PA-aware source mask optimization, the VPO method can further reduce the impact of polarization distortion on lithography imaging. Compared to current pupil wavefront optimization, the proposed VPO effectively reduces the pattern error by 37.2%, which demonstrates the VPO method can improve lithography pattern fidelity.