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Updated: Dec 27, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Nano-bridged nanosphere lithography.
Lingpeng Luo1,2, Eser Metin Akinoglu1,3, Lihua Wu1
1International Academy of Optoelectronics at Zhaoqing, South China Normal University, Zhaoqing, 526238 Guangdong, People's Republic of China.
We developed nano-bridged nanosphere lithography (NB-NSL), a novel method for creating tunable nano-island arrays. This technique offers greater control over nano-island shape and size compared to conventional nanosphere lithography (NSL).
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Conventional nanosphere lithography (NSL) is a widely used technique for fabricating nanostructures.
- NSL typically produces bowtie-shaped nano-islands with sizes determined by the polystyrene (PS) sphere diameter.
- Limitations exist in controlling the morphology and diversity of nano-island arrays using conventional NSL.
Purpose of the Study:
- To develop a modified nanosphere lithography technique for enhanced control over nano-island fabrication.
- To introduce nano-bridges between PS spheres in NSL templates to enable tunable aperture shapes and sizes.
- To demonstrate the versatility of the new method in creating diverse nano-island arrays from a single PS sphere diameter.
Main Methods:
- Developed nano-bridged nanosphere lithography (NB-NSL) by modifying conventional NSL.
- Implemented a two-step process involving spin-coating styrene solution and oxygen plasma etching of the PS sphere template.
- Controlled nanobridge dimensions by adjusting pre-processing conditions and plasma etching time.
Main Results:
- Successfully formed controllable nano-bridges between PS spheres in NSL templates.
- Demonstrated precise tuning of nanobridge dimensions through process parameter control.
- Achieved lithography templates with controllable aperture shapes and sizes, leading to varied nano-island morphologies.
- Showcased the ability to fabricate diverse nano-island shapes and sizes using a single PS particle diameter, unlike conventional NSL.
Conclusions:
- NB-NSL offers a significant advancement over conventional NSL by enabling greater control over nano-island array characteristics.
- The developed method allows for the fabrication of a wide range of nano-island shapes and sizes from a single template size.
- NB-NSL provides a versatile platform for creating tailored nanostructures for various applications.
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