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Fabrication of Gate-tunable Graphene Devices for Scanning Tunneling Microscopy Studies with Coulomb Impurities

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Wafer-scale graphene quality assessment using micro four-point probe mapping.

David M A Mackenzie¹, Kristoffer G Kalhauge, Patrick R Whelan

¹Center for Nanostructured Graphene (CNG), Technical University of Denmark, DK-2800, Kgs. Lyngby, Denmark. Department of Electronics and Nanoengineering, Aalto University, PO Box 13500, FI-00076 Aalto, Finland.

|March 14, 2020

Summary

This summary is machine-generated.

Micro four-point probes (M4PP) enable rapid, lithography-free transport measurements of 2D materials. Multiplexed probes significantly increase measurement yield and allow for detailed sheet conductance mapping of graphene on SiC wafers.

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Area of Science:

Materials Science
Condensed Matter Physics
Nanotechnology

Background:

Micro four-point probes (M4PP) are essential for characterizing transport properties of planar surfaces and 2D materials.
Automated, lithography-free measurements are crucial for efficient material characterization.

Purpose of the Study:

To assess the efficacy of a multiplexed seven-point probe for sheet conductance mapping of graphene on SiC.
To evaluate the impact of multiplexed probes on measurement yield and data correlation.
To investigate the stability of graphene's sheet conductance over time using M4PP.

Main Methods:

Sheet conductance wafer mapping of graphene grown on a 100 mm SiC wafer using a multiplexed seven-point probe.
Comparison of measurement yield between single-probe and multiplexed seven-point probe configurations.
Correlation analysis of data from adjacent subprobes to assess sample uniformity.
Terahertz time-domain spectroscopy (THz-TDS) for conductivity mapping before and after M4PP measurements.

Main Results:

The multiplexed seven-point probe increased measurement yield from 72%-84% to 97% compared to a single probe.
Increased relative differences in sheet conductance were observed between adjacent subprobes in transition regions.
M4PP measurements did not significantly alter graphene's conductivity, as confirmed by THz-TDS, which showed consistent qualitative changes over time.

Conclusions:

Multiplexed M4PP offers a significant improvement in measurement yield for wafer-scale graphene characterization.
The technique provides valuable insights into sample uniformity and localized conductivity variations.
M4PP is a non-destructive method suitable for long-term monitoring of 2D material properties.