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Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
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Temperature-Pressure Phase Relationships in Niobium Pentoxide

J L Waring1, R S Roth1, H S Parker1

  • 1Institute for Materials Research, National Bureau of Standards, Washington, D.C. 20234.

Journal of Research of the National Bureau of Standards. Section A, Physics and Chemistry
|March 20, 2020
PubMed

Keywords:
Niobium pentoxidephase relationshipspressuretemperature

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