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A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures.

Chang Ge1, Edmond Cretu1

  • 1Department of Electrical and Computer Engineering, University of British Columbia; 3063-2332 Main Mall, Vancouver, BC V6T 1Z4, Canada.

Micromachines
|March 22, 2020
PubMed
Summary

A novel "border-bulk micromachining" process simplifies SU-8 in-plane micro electro-mechanical systems (MEMS) fabrication. This robust, four-step method enhances SU-8 MEMS for low-cost, disposable, and wearable applications.

Keywords:
SU-8 micromachininglaser micromachiningmaskless lithographypolymer substratepolymeric MEMS

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • Micro electro-mechanical systems (MEMS) are crucial for microsystems.
  • SU-8 based MEMS offer potential for cost-effective and wearable devices.
  • Existing fabrication methods for in-plane MEMS can be complex and costly.

Purpose of the Study:

  • To introduce a simplified fabrication process for SU-8 in-plane MEMS structures.
  • To enhance the applicability of SU-8 MEMS in low-cost and wearable technologies.
  • To demonstrate a robust and reproducible manufacturing method.

Main Methods:

  • Developed a four-step
  • border-bulk micromachining
  • process for SU-8 in-plane MEMS.
  • Utilized laser-based micromachining for direct polyimide processing.
  • Incorporated SU-8 lithography, copper wet etching, and aluminum sputtering on copper-polyimide composites.

Main Results:

  • Successfully fabricated suspended SU-8 in-plane MEMS structures.
  • Achieved a simplified fabrication flow compared to existing methods.
  • Demonstrated process qualities including controllability, reproducibility, and robustness through characterization of test structures.

Conclusions:

  • The
  • border-bulk micromachining
  • process is a viable and simplified method for SU-8 in-plane MEMS.
  • This technique is suitable for developing low-cost/disposable and wearable MEMS.
  • The process exhibits excellent controllability, reproducibility, and robustness.