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Updated: Dec 25, 2025

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
Published on: October 6, 2020
Fabrication of periodic nano-porous surface structure for highly sensitive gravimetric quartz crystal applications
Deuk-Yong Shim1, Woo-Sik Kim2, Sang-Mok Chang3
1Major in Chemical Engineering, Dong-A University, 840 Hadan, Saha-gu, Busan, 49315, Republic of Korea.
Abstract:
A periodic nano-porous surface on quartz crystal electrodes was carefully fabricated for increasing the mass-sensitive areas. Detailed porous structures were prepared by analyzing Au electrochemical reduction process of PS layer coated quartz crystals. The sensitivity measurement of the porous quartz crystals was performed with several traditional methods, and an optimized reduction time for higher sensitivity was determined. The frequency shift of the nano-porous quartz crystals showed 10 times bigger change with the same concentration of target solutions in self-assembly procedures. In the procedures, the freshly increased surface portion did not produce additional molecular slip-effects on the measured resonant resistance values, thus, the periodic porous chips showed another side merit for the mass sensor applications. We propose a possible use of the current porous surface as a platform for developing other high-performance sensors and analyses.

