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A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure

Tao Wang1,2,3, Zhengjie Tang1,2,3, Huamao Lin3

  • 1University of Electronic Science and Technology of China, School of Electronic Science and Engineering, Xiyuan Avenue, Chengdu 611731, China.

Sensors (Basel, Switzerland)
|March 28, 2020
PubMed

Keywords:
acoustic wavepiezoelectricpressure sensortemperature compensationvacuum cavity

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