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Updated: Dec 25, 2025

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High-precision microdisplacement sensor based on zeroth-order diffraction using a single-layer optical grating.

Hongbo Zhao, Mengwei Li, Rui Zhang

    Applied Optics
    |April 1, 2020
    PubMed
    Summary
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    This study introduces a high-precision microdisplacement sensor using optical grating diffraction. It achieves high sensitivity and resolution for accurate measurements up to 100 µm.

    Area of Science:

    • Optics and Photonics
    • Metrology and Measurement Science

    Background:

    • Optical interferometry is crucial for high-precision measurements.
    • Grating-based sensors offer potential for compact and sensitive displacement detection.

    Purpose of the Study:

    • To develop a high-precision microdisplacement sensor utilizing zeroth-order diffraction from a single-layer optical grating.
    • To optimize grating parameters for enhanced interferometric detection contrast.

    Main Methods:

    • Employing laser grating interference with a single-layer optical grating and a mirror.
    • Utilizing diffraction scalar theory to optimize grating duty cycle and diffraction orders.
    • Implementing optical interferometric detection for microdisplacement sensing.

    Main Results:

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    • Achieved a sensitivity of 0.40%/nm.
    • Demonstrated a resolution of 0.6 nm.
    • Obtained a full-scale measurement range of up to 100 µm.

    Conclusions:

    • The developed microdisplacement sensor offers high performance and precision.
    • This work provides a foundation for designing ultracompact displacement sensors.
    • The optimized grating parameters enhance optical interferometric detection contrast.