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Large-scale range diffraction grating displacement sensor based on polarization phase-shifting.

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    Summary
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    This study introduces a novel diffraction grating displacement sensor method. It achieves nanometer resolution and an extended operational range using polarization phase-shifting and digital signal conversion.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Sensor Technology

    Background:

    • Diffraction grating displacement sensors are crucial for precise measurements.
    • Existing sensors often face limitations in achieving both high resolution and extended range simultaneously.
    • The need for advanced displacement sensing in large-scale applications is growing.

    Purpose of the Study:

    • To propose and demonstrate an improved diffraction grating displacement sensor.
    • To achieve simultaneous nanometer-level resolution and an extended operational range.
    • To provide guidance for designing high-performance micro-displacement sensors.

    Main Methods:

    • Exploiting a polarization phase-shifting optical path to extract quadrature sinusoidal signals.
    • Utilizing an interpolation circuit for nonlinear conversion of sinusoidal signals into a standard incremental AB quadrature digital signal.
    • Leveraging laser coherence length to extend the sensor's operational range.

    Main Results:

    • Successfully demonstrated a method to enhance diffraction grating displacement sensor performance.
    • Achieved simultaneous nanometer-level resolution and an extended measurement range.
    • Enabled displacement measurement over large-scale ranges.

    Conclusions:

    • The proposed method effectively overcomes limitations of traditional displacement sensors.
    • This advancement is significant for large-scale displacement measurement applications.
    • Offers a valuable design guide for future high-performance micro-displacement sensors.